- Key performance benefit: Foamtec UltraSOLV® ScrubPAD 2000 Diamond Grit pads provide exceptional cleaning efficiency in semiconductor manufacturing environments. They are specifically designed to remove residues from CVD, PECVD, dry etch, PVD, and ion implant tools, minimizing equipment downtime.
- Material & construction: These pads are constructed with high-quality diamond grit, ensuring durability and effective abrasion. The diamond grit offers a superior cleaning action tailored to various surface materials.
- Risk reduction / compliance benefit: Engineered to minimize particle generation, these pads help maintain the integrity of sensitive equipment. Their low ionic residue feature ensures that no new contaminants are introduced during the cleaning process.
- Protection level: Safe for use on aluminum, stainless steel, ceramic, glass, quartz, and anodized surfaces, these pads prevent damage while effectively cleaning semiconductor tools.
- Comfort & usability: The design of the ScrubPADs ensures quick and thorough residue removal, reducing cleaning time and enhancing user efficiency. Their versatility in grit options allows for tailored cleaning actions.
- Safety & compliance assurance: While there are no specific certifications listed, these pads are designed with safety in mind, adhering to industry standards for semiconductor equipment maintenance.
Recommended For
- Semiconductor wafer fabs
- CVD tool maintenance
- PECVD cleaning processes
- Dry etch equipment cleaning
- PVD tool maintenance
- Ion implant tool cleaning
Primary Industries
- Semiconductor manufacturing
- Electronics fabrication
- Cleanroom maintenance
- Precision equipment cleaning
Product Details
- SKU: HT4520PD-10
- Grit: 2000 Diamond Grit
- Packaging: 10 ScrubPADS/Pack, 10 Packs/Case - 100 ScrubPADS Total



