- Key performance benefit: Foamtec UltraSOLV ScrubPADs are engineered for precision cleaning, ensuring quick and thorough residue removal. This efficiency reduces cleaning time and equipment downtime, optimizing semiconductor manufacturing processes.
- Material & construction: Constructed with 360 diamond grit, these pads offer robust abrasive action. The diamond grit provides durability and consistent performance across various cleaning tasks.
- Risk reduction/compliance benefit: Designed to minimize particle generation, these pads help maintain the integrity of sensitive semiconductor equipment, crucial for compliance with industry cleanliness standards.
- Protection level: The pads are safe for use on aluminum, stainless steel, ceramic, glass, quartz, and anodized surfaces, preventing damage during cleaning operations.
- Comfort & usability: The ScrubPADs are easy to handle and use, providing effective cleaning without introducing new contaminants, thanks to their low ionic residue.
- Safety & compliance assurance: California Prop 65 warning ensures users are informed of potential chemical exposure, maintaining compliance with safety regulations.
Recommended For
- Wafer fabrication cleaning
- CVD equipment maintenance
- PECVD tool cleaning
- Dry etch process equipment
- PVD system upkeep
- Ion implant tool maintenance
Available Variants
- Foamtec UltraSOLV® ScrubPAD 360 Diamond Grit - 100 Pads/Case - HT4536D-10 (SKU: HT4536D-10)
- Foamtec UltraSOLV® ScrubPAD 360 Diamond Grit with Slits - 100 Pads/Case - HT4536DS-10 (SKU: HT4536DS-10)
Primary Industries
- Semiconductor manufacturing
- Electronics fabrication
- Precision engineering
- Cleanroom maintenance
Standards and Certifications
- California Prop 65 Warning
Product Details
- Grit: 360 Diamond Grit
- Packaging: 10 ScrubPADS/Pack, 10 Packs/Case - 100 ScrubPADS Total
- Safe for surfaces: Aluminum, stainless steel, ceramic, glass, quartz, anodized
- Low Ionic Residue: Yes
- Particle Contamination Reduction: Yes



